挠性衬底安装在圆柱形衬托器上。
The susceptor rested on a pedestal whose shaft is connected to a motor that provides rotation.器 安装在轴承台上,它的支架与提供旋转的马达相接。
In the other embodiment, the susceptor cross section is a polygon with a plurality of substrates mounted on its facets.在另一个实施方式中,衬托器截面是多边形,且多个衬底安装在衬托器的面上。